| Presentation | 1999/7/23 Properties of PZT Thin Films Prepared at Various Targets with Metallic Mode Reactive Sputtering : Composite, Powder, and Mixture Targets J.-D. Kim, S. Kawagoe, K. Sasaki, T. Hata, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For a (ZrTi+PbO) composite target using metallic mode of reactive sputtering, ferroelectric PZT thin films were obtained with high-deposition rate of 8nm/min at the low temperature of 450℃. A film deposited at a powder target with a stoichiometric composition of PZT of Pb:Ti:Zr=1:0.5:0.5 had almost the same crystal structure as that of a film produced using a composite target. The source of oxygen in PZT thin film in metallic mode of reactive sputtering was found to be from PbO pellets. For a (ZrO_2+Pb+Ti) mixture target, perovskite PZT thin film could not be obtained. This may be due to the differences in sputtering yield for Zr and ZrO_2 atoms or in the heat of formation for PbO and ZrO_2 molecules. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Ferroelectric / PZT / Reactive sputtering / Metallic mode |
| Paper # | ICD99-106 |
| Date of Issue |
| Conference Information | |
| Committee | ICD |
|---|---|
| Conference Date | 1999/7/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
|---|---|
| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Properties of PZT Thin Films Prepared at Various Targets with Metallic Mode Reactive Sputtering : Composite, Powder, and Mixture Targets |
| Sub Title (in English) | |
| Keyword(1) | Ferroelectric |
| Keyword(2) | PZT |
| Keyword(3) | Reactive sputtering |
| Keyword(4) | Metallic mode |
| 1st Author's Name | J.-D. Kim |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering, Kanazawa University() |
| 2nd Author's Name | S. Kawagoe |
| 2nd Author's Affiliation | Department of Electrical and Computer Engineering, Kanazawa University |
| 3rd Author's Name | K. Sasaki |
| 3rd Author's Affiliation | Department of Electrical and Computer Engineering, Kanazawa University |
| 4th Author's Name | T. Hata |
| 4th Author's Affiliation | Department of Electrical and Computer Engineering, Kanazawa University |
| Date | 1999/7/23 |
| Paper # | ICD99-106 |
| Volume (vol) | vol.99 |
| Number (no) | 234 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |