| Presentation | 1999/7/23 Degradation Behavior in the Remnant Polarization of SrBi_2Ta_2O_9 Thin Films by Hydrogen Annealing and its Recovery by Post-annealing. Oh Seong Kwon, Cheol Seong Hwang, Suk-Kyoung Hong, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The degradation behavior in the remnant polarization (Pr) of sol-gel-derived SrBi_2Ta_2O_9 (SBT) thin films having Pt top and bottom electrodes by annealing under a 5% H_2/95% N_2 atmosphere is investigated. The hydrogen annealing is performed at temperatures ranging from 250℃ to 480℃. By the annealing, the Pr drops to almost zero for all temperatures. Post-annealing at temperatures higher than 700℃ under an air atmosphere recovers the Pr. Interestingly, the recovery is most ineffective for the sample annealed at the Curie temperature (Tc) of the SBT films. A phenomenological model that explains this anomalous recovery behavior is presented. |
| Keyword(in Japanese) | (See Japanese page) |
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| Paper # | ICD99-105 |
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| Committee | ICD |
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| Conference Date | 1999/7/23(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Degradation Behavior in the Remnant Polarization of SrBi_2Ta_2O_9 Thin Films by Hydrogen Annealing and its Recovery by Post-annealing. |
| Sub Title (in English) | |
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| 1st Author's Name | Oh Seong Kwon |
| 1st Author's Affiliation | School of Material Science and Engineering, Seoul National University() |
| 2nd Author's Name | Cheol Seong Hwang |
| 2nd Author's Affiliation | School of Material Science and Engineering, Seoul National University |
| 3rd Author's Name | Suk-Kyoung Hong |
| 3rd Author's Affiliation | Semiconductor Advanced Research Division Hyundai Electronics Industries Co., Ltd. |
| Date | 1999/7/23 |
| Paper # | ICD99-105 |
| Volume (vol) | vol.99 |
| Number (no) | 234 |
| Page | pp.pp.- |
| #Pages | 6 |
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