Presentation | 1999/7/23 Electrical Properties of Pt/SrBi_2Ta_2O_9/Pt/SiO_2/Si MFMIS Structures and FETs with Various Area Ratios of MFM capacitor to Pt Floating Gate Eisuke Tokumitsu, Atsuhiro Amano, Gen Fujii, Hiroshi Ishiwara, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We report the fabrication and characterization of Pt/SrBi_2Ta_2O_9/Pt/SiO_2/Si MFMIS structures and FETs. The area ratio of the Pt/SrBi_2Ta_2O_9/Pt MFM capacitor to the Pt/SiO_2/Si MIS structure is varied from 1:10 to 1:10. It is found that by using a small MFM capacitor on a large MIS structure, a large memory window more than 4 V and a long data retention time can be obtained. Furthermore, non-volatile memory operations of Pt/SrBi_2Ta_2O_9/Pt/SiO_2/Si MFMIS-FETs is demonstrated. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | ferroelectric memory / ferroelectric-gate transisitor / MFMISFET / SrBi_2Ta_2O_9 |
Paper # | ICD99-103 |
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Conference Information | |
Committee | ICD |
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Conference Date | 1999/7/23(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Integrated Circuits and Devices (ICD) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Electrical Properties of Pt/SrBi_2Ta_2O_9/Pt/SiO_2/Si MFMIS Structures and FETs with Various Area Ratios of MFM capacitor to Pt Floating Gate |
Sub Title (in English) | |
Keyword(1) | ferroelectric memory |
Keyword(2) | ferroelectric-gate transisitor |
Keyword(3) | MFMISFET |
Keyword(4) | SrBi_2Ta_2O_9 |
1st Author's Name | Eisuke Tokumitsu |
1st Author's Affiliation | Precision & Intelligence Laboratory, Tokyo Institute of Technology() |
2nd Author's Name | Atsuhiro Amano |
2nd Author's Affiliation | Frontier Collaborative Research Center, Tokyo Institute of Technology |
3rd Author's Name | Gen Fujii |
3rd Author's Affiliation | Frontier Collaborative Research Center, Tokyo Institute of Technology |
4th Author's Name | Hiroshi Ishiwara |
4th Author's Affiliation | Precision & Intelligence Laboratory, Tokyo Institute of Technology:Frontier Collaborative Research Center, Tokyo Institute of Technology |
Date | 1999/7/23 |
Paper # | ICD99-103 |
Volume (vol) | vol.99 |
Number (no) | 234 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |