Presentation | 1999/7/23 Dependence of Reverse Narrow Width Effect and Sub-threshold Hump Characteristics on the Gate length Jong-Wan Jung, Jeong-Hwan Son, Won-Ju Cho, Young-Jong Lee, Kyung-Ho Lee, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have found that RNWE and sub-threshold hump characteristics strongly depend on the gate length and the hump get strongest at the gate length at which the threshold voltage is highest. We can explain it by the two effects below. First, as the gate-length gets shorter, the effective boron concentration at channel gets higher by halo and TED. Second, the boron depletion near STI gets higher at short gate-length than at long gate-length. It is because the boron depletion or pile-up is enhanced by TED due to S/D implant damage (interstitial). These two effects both results in the stronger RNWE and threshold hump at short gate-length than at the long gate-length. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | MOSFET / Hump / RNWE / STI / TED / Interstitial |
Paper # | ICD99-95 |
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Conference Information | |
Committee | ICD |
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Conference Date | 1999/7/23(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
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Paper Information | |
Registration To | Integrated Circuits and Devices (ICD) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Dependence of Reverse Narrow Width Effect and Sub-threshold Hump Characteristics on the Gate length |
Sub Title (in English) | |
Keyword(1) | MOSFET |
Keyword(2) | Hump |
Keyword(3) | RNWE |
Keyword(4) | STI |
Keyword(5) | TED |
Keyword(6) | Interstitial |
1st Author's Name | Jong-Wan Jung |
1st Author's Affiliation | LG Semicon Co., Ltd.() |
2nd Author's Name | Jeong-Hwan Son |
2nd Author's Affiliation | LG Semicon Co., Ltd. |
3rd Author's Name | Won-Ju Cho |
3rd Author's Affiliation | LG Semicon Co., Ltd. |
4th Author's Name | Young-Jong Lee |
4th Author's Affiliation | LG Semicon Co., Ltd. |
5th Author's Name | Kyung-Ho Lee |
5th Author's Affiliation | LG Semicon Co., Ltd. |
Date | 1999/7/23 |
Paper # | ICD99-95 |
Volume (vol) | vol.99 |
Number (no) | 234 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |