Presentation | 1999/7/22 Thermal Oxidation Characteristics of Oxide Grown on Si Exposed to Nitrogen Plasma and its Reliability Akihiro Ikeda, Chika Fujiki, Kenichi Takagi, Yukinori Kuroki, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Thermal oxidation characteristics and reliability of SiO_2 grown on Si exposed to nitrogen plasma were evaluated, 110Å thick SiO_2 was grown with rapid thermal oxidation of 90sec without the nitrogen plasma exposure. While, SiO_2 thickness was 92Å and 61Å for the same thermal oxidation time with lightly and heavily plasma nitridation, respectively. This decreasing of SiO_2 growth rates might be associated to nitrogen atoms incorporated at SiO_2/Si by the nitrogen plasma exposure. For the SiO_2 without the nitrogen plasma exposure, tunneling current at -6MV/cm gate electric field was increased from -3.5A/cm^2 to -13.6A/cm^2 by the current stress of -5×10^<-7>A/cm^2 for 100sec. While, tunneling current was not increased by the same current stress for the lightly nitrided SiO_2. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | plasma nitridation / rapid thermal oxidation / oxynitride / reliability |
Paper # | ICD99-64 |
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Conference Information | |
Committee | ICD |
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Conference Date | 1999/7/22(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Integrated Circuits and Devices (ICD) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Thermal Oxidation Characteristics of Oxide Grown on Si Exposed to Nitrogen Plasma and its Reliability |
Sub Title (in English) | |
Keyword(1) | plasma nitridation |
Keyword(2) | rapid thermal oxidation |
Keyword(3) | oxynitride |
Keyword(4) | reliability |
1st Author's Name | Akihiro Ikeda |
1st Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University() |
2nd Author's Name | Chika Fujiki |
2nd Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
3rd Author's Name | Kenichi Takagi |
3rd Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
4th Author's Name | Yukinori Kuroki |
4th Author's Affiliation | Graduate School of Information Science and Electrical Engineering, Kyushu University |
Date | 1999/7/22 |
Paper # | ICD99-64 |
Volume (vol) | vol.99 |
Number (no) | 233 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |