| Presentation | 1994/11/25 Development and Application of Piezoresistance Stress Sensor Kikuko Sugimae, Tsutomu Nakazawa, Kanako Sawada, Toshio Sudo, Morihiko Ikemizu, Hiroyuki Kozono, Sigeki Sakoh, Hiromichi Sawaya, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This Paper describes the development of stress sensor for the measurement of an internal stress in plastic package.This stress sensor uses the piezoresistive effect.First,the piezoresistive coefficients(π11+π12,π44)are determined using Four-Point bending strip of silicon. Next,the compress stress after molding process are obtained from 80 to 120 MPa. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | piezoresistive / stress / plastic / sensor |
| Paper # | ICD94-150 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 1994/11/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development and Application of Piezoresistance Stress Sensor |
| Sub Title (in English) | |
| Keyword(1) | piezoresistive |
| Keyword(2) | stress |
| Keyword(3) | plastic |
| Keyword(4) | sensor |
| 1st Author's Name | Kikuko Sugimae |
| 1st Author's Affiliation | Semiconductor Device Engineering Laboratory,Toshiba Corporation() |
| 2nd Author's Name | Tsutomu Nakazawa |
| 2nd Author's Affiliation | Semiconductor Device Engineering Laboratory,Toshiba Corporation |
| 3rd Author's Name | Kanako Sawada |
| 3rd Author's Affiliation | Semiconductor Device Engineering Laboratory,Toshiba Corporation |
| 4th Author's Name | Toshio Sudo |
| 4th Author's Affiliation | Semiconductor Device Engineering Laboratory,Toshiba Corporation |
| 5th Author's Name | Morihiko Ikemizu |
| 5th Author's Affiliation | Semiconductor Manufacturigand and Engineering Department,Toshiba Corp |
| 6th Author's Name | Hiroyuki Kozono |
| 6th Author's Affiliation | Semiconductor Manufacturigand and Engineering Department,Toshiba Corp |
| 7th Author's Name | Sigeki Sakoh |
| 7th Author's Affiliation | Semiconductor Manufacturigand and Engineering Department,Toshiba Corp |
| 8th Author's Name | Hiromichi Sawaya |
| 8th Author's Affiliation | Semiconductor Manufacturigand and Engineering Department,Toshiba Corp |
| Date | 1994/11/25 |
| Paper # | ICD94-150 |
| Volume (vol) | vol.94 |
| Number (no) | 361 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |