| Presentation | 1999/1/20 MOVPE-Grown InP/InGaAs HBTs with a Carbon-Doped Base Layer Shoji Yamahata, kenji Kurishima, Hiroki Nakajima, Noriyuki Watanabe, Yasunobu Ishii, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The new high-temperature dehydrogenation annealing method improves the hole activity of a carbon-doped InGaAs base layer passivated by hydrogen during MOVPE growth, compared to the conventional annealing in a as-grown. A use of this dehydrogenation annealing leads to good performance carbon-doped InP/InGaAs HBTs with a peak f_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | InP / InGaAs / HBT / MOVPE / C-doped InGaAs base / Dehydrogenation annealing / Reliability |
| Paper # | ED98-184,MW98-147,ICD98-251 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 1999/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | MOVPE-Grown InP/InGaAs HBTs with a Carbon-Doped Base Layer |
| Sub Title (in English) | |
| Keyword(1) | InP |
| Keyword(2) | InGaAs |
| Keyword(3) | HBT |
| Keyword(4) | MOVPE |
| Keyword(5) | C-doped InGaAs base |
| Keyword(6) | Dehydrogenation annealing |
| Keyword(7) | Reliability |
| 1st Author's Name | Shoji Yamahata |
| 1st Author's Affiliation | NTT System Electronics Laboratories() |
| 2nd Author's Name | kenji Kurishima |
| 2nd Author's Affiliation | NTT System Electronics Laboratories |
| 3rd Author's Name | Hiroki Nakajima |
| 3rd Author's Affiliation | NTT System Electronics Laboratories |
| 4th Author's Name | Noriyuki Watanabe |
| 4th Author's Affiliation | NTT System Electronics Laboratories |
| 5th Author's Name | Yasunobu Ishii |
| 5th Author's Affiliation | NTT System Electronics Laboratories |
| Date | 1999/1/20 |
| Paper # | ED98-184,MW98-147,ICD98-251 |
| Volume (vol) | vol.98 |
| Number (no) | 523 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |