| Presentation | 1998/7/23 Evaluation of tailored perovskite electrode for(Ba, Sr)TiO_3 Dyun-Kyun Choi, Se-Guen Park, Boum Seock Kim, Sung-Sik Park, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Electrical properties of(Ba, Sr)TiO_3 thin films were investigated in terms of the microstructure and composition of the perovskite (Sr, Ca)RuO_3 bottom electrode. SCR electrode led to the leakage current density(10^<-7>A/cm^2)of BST films about an order lower than that on RuO_2.The leakage current was not sensitive to the composition of SCR electrodes, while the dielectric constant of BST/SCR thin film capacitor ranged from 160 to 280 depending on the Sr/Ca ratio in SCR electrodes.The BST/SCR system resulted in a 5-nm-thick interfacial layer which is about a half of that in BST/Pt.Furthermore, that interfacial layer turned out to be partially crystallized from the lattice image taken by HRTEM.Therefore, the enhancement in electrical properties of BST films is from the improvement of interfacial characteristics originated from the structural matching. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | (Ba, Sr)TiO_3 / (Sr, Ca)RuO_3 / leakage current / dielectric constant / interfacial characteristics |
| Paper # | SDM98-90,ICD98-89 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 1998/7/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | KOR |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of tailored perovskite electrode for(Ba, Sr)TiO_3 |
| Sub Title (in English) | |
| Keyword(1) | (Ba, Sr)TiO_3 |
| Keyword(2) | (Sr, Ca)RuO_3 |
| Keyword(3) | leakage current |
| Keyword(4) | dielectric constant |
| Keyword(5) | interfacial characteristics |
| 1st Author's Name | Dyun-Kyun Choi |
| 1st Author's Affiliation | Department of Inorganic Materials Engineering, Hanyang University() |
| 2nd Author's Name | Se-Guen Park |
| 2nd Author's Affiliation | School of Electrical and Computer Engineering, Inha University Department of Inorganic Materials Engineering, Hanyang University, |
| 3rd Author's Name | Boum Seock Kim |
| 3rd Author's Affiliation | Department of Inorganic Materials Engineering, Hanyang University |
| 4th Author's Name | Sung-Sik Park |
| 4th Author's Affiliation | Department of Inorganic Materials Engineering, Hanyang University |
| Date | 1998/7/23 |
| Paper # | SDM98-90,ICD98-89 |
| Volume (vol) | vol.98 |
| Number (no) | 195 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |