Presentation 1998/8/20
Three-dimensional Masterslice Si MMICs Operating up to K-band
Kenjiro Nishikawa, Kenji Kamogawa, Tsuneo Tokumitsu, Chikara Yamaguchi, Ichihiko Toyoda, Makoto Hirano,
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Abstract(in English) This report demonstrates K-band amplifier and mixer using the 3-D Masterslice MMIC technology. The 3-D masterslice MMIC technology effectively isolates passive circuits form the low-resistivity Si substrate. The evaluations used a 0.5-μm Si bipolar transistor with an f_max of 30 GHz. The fabricated amplifier achieved again of 7 dB from 16 GHz to 18 GHz while the mixer achieves a conversion loss of 9 dB from 16.5 GHz to 23 GHz. The performance levels of these MMICs are comparable with those of the circuits employing GaAs MESFET. These results prove that the 3-D Masterslice MMIC technology is very effective in production of Si MMIC in a high frequency range such as up to the K-band.
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Keyword(in English) MMIC / Si / bipolar transistor / masterslice / three-dimensional / multilayer
Paper # ICD98-124
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Conference Date 1998/8/20(1days)
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Registration To Integrated Circuits and Devices (ICD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Three-dimensional Masterslice Si MMICs Operating up to K-band
Sub Title (in English)
Keyword(1) MMIC
Keyword(2) Si
Keyword(3) bipolar transistor
Keyword(4) masterslice
Keyword(5) three-dimensional
Keyword(6) multilayer
1st Author's Name Kenjiro Nishikawa
1st Author's Affiliation NTT Wireless Systems Laboratories()
2nd Author's Name Kenji Kamogawa
2nd Author's Affiliation NTT Wireless Systems Laboratories
3rd Author's Name Tsuneo Tokumitsu
3rd Author's Affiliation NTT Wireless Systems Laboratories
4th Author's Name Chikara Yamaguchi
4th Author's Affiliation NTT Integrated Information & Energy systems Laboratories
5th Author's Name Ichihiko Toyoda
5th Author's Affiliation NTT Electronics Corp.
6th Author's Name Makoto Hirano
6th Author's Affiliation NTT Electronics Corp.
Date 1998/8/20
Paper # ICD98-124
Volume (vol) vol.98
Number (no) 244
Page pp.pp.-
#Pages 6
Date of Issue