Presentation 1993/12/17
Si-on-Si Packaging Technology for Ultra-High-Speed Multi Processor System
Kazumichi Miyamoto, Noboru Masuda, Osamu Miura, Kazunori Nakajima, Yuuji Fujita, Satoshi Yoshida, Takao Mori, Kenji Yamaguchi, Mamoru Mita,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Tightyly coupled multi processor system requires high-density packaging technology to reduce interconnection delays between the processor and work storages(secondary caches).So it becomes quite significant to minimize the system controller which connects the processor and the memories.However,the system controller cannot be in one chip because it is difficult to connect thousands of I, O pins.We have proposed a new silicon-on-silicon packaging concept which mounts processor chips and memories on a large-area LSI. Packaging density is greatly improved with this concept. This paper reports newly developed techniques for this concept,a low-resistance wiring technology on the large-area LSI,and an interconnecting method for the large-area LSI.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) silicon-on-silicon packaging / large-area LSI / copper wiring / through wafer interconnection / stacked TAB
Paper # ICD93-155
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Conference Date 1993/12/17(1days)
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Registration To Integrated Circuits and Devices (ICD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Si-on-Si Packaging Technology for Ultra-High-Speed Multi Processor System
Sub Title (in English)
Keyword(1) silicon-on-silicon packaging
Keyword(2) large-area LSI
Keyword(3) copper wiring
Keyword(4) through wafer interconnection
Keyword(5) stacked TAB
1st Author's Name Kazumichi Miyamoto
1st Author's Affiliation Central Research Laboratory,Hitachi,Ltd.()
2nd Author's Name Noboru Masuda
2nd Author's Affiliation Central Research Laboratory,Hitachi,Ltd.
3rd Author's Name Osamu Miura
3rd Author's Affiliation Hitachi Research Laboratory,Hitachi,Ltd.
4th Author's Name Kazunori Nakajima
4th Author's Affiliation Central Research Laboratory,Hitachi,Ltd.
5th Author's Name Yuuji Fujita
5th Author's Affiliation Central Research Laboratory,Hitachi,Ltd.
6th Author's Name Satoshi Yoshida
6th Author's Affiliation Central Research Laboratory,Hitachi,Ltd.
7th Author's Name Takao Mori
7th Author's Affiliation Fiberoptics Division,Hitachi,Ltd.
8th Author's Name Kenji Yamaguchi
8th Author's Affiliation Systems Material Laboratory,Hitachi Cable,Ltd.
9th Author's Name Mamoru Mita
9th Author's Affiliation Densen Works,Hitachi Cable,Ltd.
Date 1993/12/17
Paper # ICD93-155
Volume (vol) vol.93
Number (no) 394
Page pp.pp.-
#Pages 8
Date of Issue