Presentation 1998/1/21
Ku, K-Band Power HEMT with WSi/Au T-Shaped Gate
T. Kunii, N. Yoshida, S. Miyakuni, T. Shiga, T. Oku, A. Inoue, J. Udomoto, M. Komaru, S. Tsuji, T. Ishikawa,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We developed WSi/Au T-shaped buried gate pseudomorphic HEMTs with the good uniformity of recess current by using selective etching process and a high off-state break down voltage of over 19V. A 1.4W output power has been obtained with a power-added efficiency of 55.6% and an associated gain of 9.2dB under a high voltage operation of Vd=10V at 18GHz. A 21mm internally-matched HEMT has demonstrated an output power of 10.5W with a power-added efficiency of 54% and an linear gain of 9.8dB at 12GHz.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) HEMT / High efficiency / Power amplifier / GaAs
Paper # ICD97-201
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Conference Date 1998/1/21(1days)
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Registration To Integrated Circuits and Devices (ICD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Ku, K-Band Power HEMT with WSi/Au T-Shaped Gate
Sub Title (in English)
Keyword(1) HEMT
Keyword(2) High efficiency
Keyword(3) Power amplifier
Keyword(4) GaAs
1st Author's Name T. Kunii
1st Author's Affiliation Mitsubishi Electric Corporation Optoelectronic & Microwave Devices Laboratory()
2nd Author's Name N. Yoshida
2nd Author's Affiliation Mitsubishi Electric Corporation Optoelectronic & Microwave Devices Laboratory
3rd Author's Name S. Miyakuni
3rd Author's Affiliation Mitsubishi Electric Corporation Optoelectronic & Microwave Devices Laboratory
4th Author's Name T. Shiga
4th Author's Affiliation Mitsubishi Electric Corporation High Frequency & Optical Semiconductor Div.
5th Author's Name T. Oku
5th Author's Affiliation Mitsubishi Electric Corporation Optoelectronic & Microwave Devices Laboratory
6th Author's Name A. Inoue
6th Author's Affiliation Mitsubishi Electric Corporation Optoelectronic & Microwave Devices Laboratory
7th Author's Name J. Udomoto
7th Author's Affiliation Mitsubishi Electric Corporation Optoelectronic & Microwave Devices Laboratory
8th Author's Name M. Komaru
8th Author's Affiliation Mitsubishi Electric Corporation Optoelectronic & Microwave Devices Laboratory
9th Author's Name S. Tsuji
9th Author's Affiliation Mitsubishi Electric Corporation High Frequency & Optical Semiconductor Div.
10th Author's Name T. Ishikawa
10th Author's Affiliation Mitsubishi Electric Corporation Optoelectronic & Microwave Devices Laboratory
Date 1998/1/21
Paper # ICD97-201
Volume (vol) vol.97
Number (no) 480
Page pp.pp.-
#Pages 6
Date of Issue