| Presentation | 1998/1/21 Novel Fabrication Technology for Ultra-Compact Three-Dimensional MMICs Suehiro Sugitani, Kiyomitsu Onodera, Shinji Aoyama, Makoto Hirano, Kimiyoshi Yamasaki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A novel fabrication technology has been developed for ultra-compact three-dimensional (3D) MMICs. The key feature is an advanced polyimide etching process using inductively-coupled-plasma (ICP) etching with a double-layer mask, which is WSi metal covered with Si-containing photoresist. The sophisticated 3D structure with many kinds of via has been successfully fabricated in 10-μm-thick of polyimide using this technology. A unique inductor with vertical structure has been successfully fabricated. As result, circuit designers can take advantage of smaller chip area and get higher performance and greater design flexibility in MMICs. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaAs / MMIC / 3D passive circuit / polyimide / etching / via / inductor |
| Paper # | ICD97-195 |
| Date of Issue |
| Conference Information | |
| Committee | ICD |
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| Conference Date | 1998/1/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Novel Fabrication Technology for Ultra-Compact Three-Dimensional MMICs |
| Sub Title (in English) | |
| Keyword(1) | GaAs |
| Keyword(2) | MMIC |
| Keyword(3) | 3D passive circuit |
| Keyword(4) | polyimide |
| Keyword(5) | etching |
| Keyword(6) | via |
| Keyword(7) | inductor |
| 1st Author's Name | Suehiro Sugitani |
| 1st Author's Affiliation | NTT System Electronics Laboratories() |
| 2nd Author's Name | Kiyomitsu Onodera |
| 2nd Author's Affiliation | NTT System Electronics Laboratories |
| 3rd Author's Name | Shinji Aoyama |
| 3rd Author's Affiliation | NTT System Electronics Laboratories |
| 4th Author's Name | Makoto Hirano |
| 4th Author's Affiliation | NTT System Electronics Laboratories |
| 5th Author's Name | Kimiyoshi Yamasaki |
| 5th Author's Affiliation | NTT System Electronics Laboratories |
| Date | 1998/1/21 |
| Paper # | ICD97-195 |
| Volume (vol) | vol.97 |
| Number (no) | 480 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |