| Presentation | 1997/9/25 A Minimization Scheme for a period of Process Simulator Development in TCAD : Development of Simulation Standard Libraries and an Application Mitsutoshi Nakamura, Takahiro Nakauchi, Toshikazu Fukuda, Naoki Kusunoki, Takahisa Kanemura, Sanae Fukuda, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | TCAD has been expected to become a useful tool for minimizing a period of device development, and faster development of simulator is strongly demanded to fulfill the expectation. We have developed standard software libraries first, and then constructed a process simulator using these libraries as its parts. These libraries make it possible to shorten the development period. In this paper, We mainly describe about a geometry library which is one of the most important in process simulator. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | process / simulation / software development / geometry |
| Paper # | ICD97-130 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 1997/9/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Minimization Scheme for a period of Process Simulator Development in TCAD : Development of Simulation Standard Libraries and an Application |
| Sub Title (in English) | |
| Keyword(1) | process |
| Keyword(2) | simulation |
| Keyword(3) | software development |
| Keyword(4) | geometry |
| 1st Author's Name | Mitsutoshi Nakamura |
| 1st Author's Affiliation | Microelectronics Engineering Laboratory, TOSHIBA Corporation() |
| 2nd Author's Name | Takahiro Nakauchi |
| 2nd Author's Affiliation | Microelectronics Engineering Laboratory, TOSHIBA Corporation:Semiconductor DA & Test Engineering Center, TOSHIBA Corporation |
| 3rd Author's Name | Toshikazu Fukuda |
| 3rd Author's Affiliation | Microelectronics Engineering Laboratory, TOSHIBA Corporation:Semiconductor DA & Test Engineering Center, TOSHIBA Corporation |
| 4th Author's Name | Naoki Kusunoki |
| 4th Author's Affiliation | Microelectronics Engineering Laboratory, TOSHIBA Corporation |
| 5th Author's Name | Takahisa Kanemura |
| 5th Author's Affiliation | Microelectronics Engineering Laboratory, TOSHIBA Corporation |
| 6th Author's Name | Sanae Fukuda |
| 6th Author's Affiliation | Microelectronics Engineering Laboratory, TOSHIBA Corporation |
| Date | 1997/9/25 |
| Paper # | ICD97-130 |
| Volume (vol) | vol.97 |
| Number (no) | 274 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |