| Presentation | 1997/9/25 IC Process Optimization Using Technology CAD System N. Miura, K. Fukuda, K. Nishi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In scaled-down process, channel profile and drain structure have become so complecated that it would be difficult to optimize process sequences via real experiments alone. It is consequently important to optimize process sequences with TCAD simulators for shorter development cycles and lower fabrication costs. We present a developed methodology which can optimize process sequences and evaluate the device performance trade-offs in 0.3μm level MOSFETs with TCAD simulators and responce surface models(RSM). |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Response Surface Model / Local Modeling / Parameter Optimization / Sensitivity Analysis / Statistic Analysis |
| Paper # | ICD97-129 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 1997/9/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | IC Process Optimization Using Technology CAD System |
| Sub Title (in English) | |
| Keyword(1) | Response Surface Model |
| Keyword(2) | Local Modeling |
| Keyword(3) | Parameter Optimization |
| Keyword(4) | Sensitivity Analysis |
| Keyword(5) | Statistic Analysis |
| 1st Author's Name | N. Miura |
| 1st Author's Affiliation | VLSI Reserch & Development Center, Oki Electric Industry Co., Ltd.() |
| 2nd Author's Name | K. Fukuda |
| 2nd Author's Affiliation | VLSI Reserch & Development Center, Oki Electric Industry Co., Ltd. |
| 3rd Author's Name | K. Nishi |
| 3rd Author's Affiliation | VLSI Reserch & Development Center, Oki Electric Industry Co., Ltd. |
| Date | 1997/9/25 |
| Paper # | ICD97-129 |
| Volume (vol) | vol.97 |
| Number (no) | 274 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |