| Presentation | 1997/9/25 The essence of TCAD and the scheme for its research Norihiko KOTANI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | TCAD has been used for the LSI development as a tool of cost reduction and QTAT. But TCAD has an importance not only as a tool but also as a strategic meaning. If engineers do not really understand the physics of the semiconductor devices and processes, they can not develop the TCAD system and may remain insufficient level even in the usage of TCAD. Without the recognition described above, the real technology will decay in LSI makers during the promotion of TCAD usage. On the contrary it is necessary for LSI makers to develop the TCAD technology in order to obtain the ability of competition and to build up the technical identity. However it needs the very wide area of technologies to develop the TCAD system, we should apply a method of development in which we strictly distinguish between collaboration and competition. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TCAD / simulation / modeling / process simulator / device simulator / circuit simulator / equipment simulator |
| Paper # | ICD97-127 |
| Date of Issue |
| Conference Information | |
| Committee | ICD |
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| Conference Date | 1997/9/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The essence of TCAD and the scheme for its research |
| Sub Title (in English) | |
| Keyword(1) | TCAD |
| Keyword(2) | simulation |
| Keyword(3) | modeling |
| Keyword(4) | process simulator |
| Keyword(5) | device simulator |
| Keyword(6) | circuit simulator |
| Keyword(7) | equipment simulator |
| 1st Author's Name | Norihiko KOTANI |
| 1st Author's Affiliation | Semiconductor Leading Edge Technologies, Inc.() |
| Date | 1997/9/25 |
| Paper # | ICD97-127 |
| Volume (vol) | vol.97 |
| Number (no) | 274 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |