Presentation 1997/9/25
「半導体製造プロセス大規模シミュレーション実験(Virtual Wafer Fab.)の展開」 : TCADドリブンECADによる効率的開発支援システムの構築
Itaru Kamohara, Andy Strachan, Stephan Mueller, Ivan Pesic,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # ICD97-126
Date of Issue

Conference Information
Committee ICD
Conference Date 1997/9/25(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Vice Chair

Paper Information
Registration To Integrated Circuits and Devices (ICD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English)
Sub Title (in English)
1st Author's Name Itaru Kamohara
1st Author's Affiliation Silvaco International()
2nd Author's Name Andy Strachan
2nd Author's Affiliation Silvaco International
3rd Author's Name Stephan Mueller
3rd Author's Affiliation Silvaco International
4th Author's Name Ivan Pesic
4th Author's Affiliation Silvaco International
Date 1997/9/25
Paper # ICD97-126
Volume (vol) vol.97
Number (no) 274
Page pp.pp.-
#Pages 8
Date of Issue