| Presentation | 1997/9/25 「半導体製造プロセス大規模シミュレーション実験(Virtual Wafer Fab.)の展開」 : TCADドリブンECADによる効率的開発支援システムの構築 Itaru Kamohara, Andy Strachan, Stephan Mueller, Ivan Pesic, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | ICD97-126 |
| Date of Issue |
| Conference Information | |
| Committee | ICD |
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| Conference Date | 1997/9/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Itaru Kamohara |
| 1st Author's Affiliation | Silvaco International() |
| 2nd Author's Name | Andy Strachan |
| 2nd Author's Affiliation | Silvaco International |
| 3rd Author's Name | Stephan Mueller |
| 3rd Author's Affiliation | Silvaco International |
| 4th Author's Name | Ivan Pesic |
| 4th Author's Affiliation | Silvaco International |
| Date | 1997/9/25 |
| Paper # | ICD97-126 |
| Volume (vol) | vol.97 |
| Number (no) | 274 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |