Presentation | 1997/9/25 An Implementation of Transient Enhanced Diffusion Model into the FEM-based 2-D Process Simulator FFEAST N. Sugiyasu, K. Suzuki, S. Kojima, Y. Ohyama, H. Goto, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have proposed a coupled and de-coupled combined method to solve the PDE for a transient enhanced diffusion model. In the case of a boron diffusion process, the sum of interstitial Si and impurity-interstitial pair concentration, the sum of vacancy and impurity-vacancy pair concentration, and each chemivcal impurity concentration are kept constant and the charge neutrality law is applied. This procedure has realized a robust solution system which is implemented to the FEM-based 2-D process simulator FFEAST, and transient enhanced diffusion simulation for a sub-quarter micron nMOSFET has been demonstrated. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Peocess Simulation / Transient Enhanced Diffusion / Solution |
Paper # | ICD97-122 |
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Conference Information | |
Committee | ICD |
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Conference Date | 1997/9/25(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Integrated Circuits and Devices (ICD) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | An Implementation of Transient Enhanced Diffusion Model into the FEM-based 2-D Process Simulator FFEAST |
Sub Title (in English) | |
Keyword(1) | Peocess Simulation |
Keyword(2) | Transient Enhanced Diffusion |
Keyword(3) | Solution |
1st Author's Name | N. Sugiyasu |
1st Author's Affiliation | Technblogy Development Divion, Fujitsu Limited() |
2nd Author's Name | K. Suzuki |
2nd Author's Affiliation | Technblogy Development Divion, Fujitsu Limited |
3rd Author's Name | S. Kojima |
3rd Author's Affiliation | Technblogy Development Divion, Fujitsu Limited |
4th Author's Name | Y. Ohyama |
4th Author's Affiliation | Technblogy Development Divion, Fujitsu Limited |
5th Author's Name | H. Goto |
5th Author's Affiliation | Technblogy Development Divion, Fujitsu Limited |
Date | 1997/9/25 |
Paper # | ICD97-122 |
Volume (vol) | vol.97 |
Number (no) | 274 |
Page | pp.pp.- |
#Pages | 7 |
Date of Issue |