| Presentation | 1997/9/25 Development of a Universal Diffusion Scheme for a Two-Dimensional Process Simulator Shigetaka Kumashiro, Hironori Sakamoto, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A scheme which can easily incorporate new diffusion models has been implemented in a two-dimensional process simulator. Compared with the existing PDE solvers used for prototype models development, the new scheme has following features: 1.MUltiple regions can be handled, 2.Impurity pile-up can be modeled by means of the inter-layers placed between the regions, 3.Coupling diffusion flux can be defined between two defferent diffusers in the different regions, 4.Because it is implemented as one function of a full process simulator, both realistic initial conditions and realistic device structures can be handled. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Proccss simulator / Partial differential equation solver / Impurity diffusion / Universal diffusion scheme / Point-defect pair diffusion model |
| Paper # | ICD97-120 |
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| Conference Information | |
| Committee | ICD |
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| Conference Date | 1997/9/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of a Universal Diffusion Scheme for a Two-Dimensional Process Simulator |
| Sub Title (in English) | |
| Keyword(1) | Proccss simulator |
| Keyword(2) | Partial differential equation solver |
| Keyword(3) | Impurity diffusion |
| Keyword(4) | Universal diffusion scheme |
| Keyword(5) | Point-defect pair diffusion model |
| 1st Author's Name | Shigetaka Kumashiro |
| 1st Author's Affiliation | ULSI Device Development Laboratories, NEC Corporation() |
| 2nd Author's Name | Hironori Sakamoto |
| 2nd Author's Affiliation | ULSI Device Development Laboratories, NEC Corporation |
| Date | 1997/9/25 |
| Paper # | ICD97-120 |
| Volume (vol) | vol.97 |
| Number (no) | 274 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |