| Presentation | 1997/7/25 Oxide Reliability Improvement Controlling Microstructures of Substrate/Oxide and Oxide/Gate Interfaces Jiro Yugami, Toshiyuki Mine, Toshihiko Itoga, Makoto Ohkura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For future ULSIs, the oxide reliability problem is key issue to realize low power, high-speed devices keeping it's reliability. In MOSFET structure, gate oxide consist from substrate/oxide interface, oxide and oxide/gate interface. Therefore, to improve oxide reliability, it is important to control these three component structures individually. In this report, experiments to control structures of above two interfaces using (1) combination of closed wet cleaning system and load-lock oxidation system and (2) ultra-thin film deposition CVD technique are described. By controlling these structures, the oxide reliability improved. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | gate oxide / oxide reliability / interface structure |
| Paper # | ICD97-83 |
| Date of Issue |
| Conference Information | |
| Committee | ICD |
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| Conference Date | 1997/7/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Oxide Reliability Improvement Controlling Microstructures of Substrate/Oxide and Oxide/Gate Interfaces |
| Sub Title (in English) | |
| Keyword(1) | gate oxide |
| Keyword(2) | oxide reliability |
| Keyword(3) | interface structure |
| 1st Author's Name | Jiro Yugami |
| 1st Author's Affiliation | Central Research Laboratory, Hitachi., Ltd.() |
| 2nd Author's Name | Toshiyuki Mine |
| 2nd Author's Affiliation | Central Research Laboratory, Hitachi., Ltd. |
| 3rd Author's Name | Toshihiko Itoga |
| 3rd Author's Affiliation | Central Research Laboratory, Hitachi., Ltd. |
| 4th Author's Name | Makoto Ohkura |
| 4th Author's Affiliation | Central Research Laboratory, Hitachi., Ltd. |
| Date | 1997/7/25 |
| Paper # | ICD97-83 |
| Volume (vol) | vol.97 |
| Number (no) | 198 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |