| Presentation | 1997/7/25 Bird's Beak free LOCOS Isolation for 256M DRAM Cheol Soo Park, Chi-Sun Hwang, Young Tag Woo, Sung-Joo Hong, In Sul Chung, Sung Wook Park, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A simple and bird's beak free isolation technology using LOCOS for 256M DRAM scale device is developed. In general, the length of bird's beak is controled under the ratio of pad nitride layer thickness and pad oxide layer thickness. To minimize the length of bird's beak, we use the native oxide created on the top of the chemically cleaned Si substrate as a pad oxide. With lowering the field oxidation ambient temperature to 950℃, the defects due to excess stress of the pad nitride layer disappeared and the length of bird's beak is more reduced. The evaluation of the electrical characteristics is in progress, but some results show that there are many points to be improved. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | LOCOS / Isolation / Bird's Beak / Field Oxide / 256M DRAM / junction leakage current |
| Paper # | ICD97-81 |
| Date of Issue |
| Conference Information | |
| Committee | ICD |
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| Conference Date | 1997/7/25(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Integrated Circuits and Devices (ICD) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Bird's Beak free LOCOS Isolation for 256M DRAM |
| Sub Title (in English) | |
| Keyword(1) | LOCOS |
| Keyword(2) | Isolation |
| Keyword(3) | Bird's Beak |
| Keyword(4) | Field Oxide |
| Keyword(5) | 256M DRAM |
| Keyword(6) | junction leakage current |
| 1st Author's Name | Cheol Soo Park |
| 1st Author's Affiliation | Memory Research & Development Division, Hyundai Electronics() |
| 2nd Author's Name | Chi-Sun Hwang |
| 2nd Author's Affiliation | Memory Research & Development Division, Hyundai Electronics |
| 3rd Author's Name | Young Tag Woo |
| 3rd Author's Affiliation | Memory Research & Development Division, Hyundai Electronics |
| 4th Author's Name | Sung-Joo Hong |
| 4th Author's Affiliation | Memory Research & Development Division, Hyundai Electronics |
| 5th Author's Name | In Sul Chung |
| 5th Author's Affiliation | Memory Research & Development Division, Hyundai Electronics |
| 6th Author's Name | Sung Wook Park |
| 6th Author's Affiliation | Memory Research & Development Division, Hyundai Electronics |
| Date | 1997/7/25 |
| Paper # | ICD97-81 |
| Volume (vol) | vol.97 |
| Number (no) | 198 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |