| 講演名 | 1997/7/24 Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers , |
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| PDFダウンロードページ | PDFダウンロードページへ |
| 抄録(和) | |
| 抄録(英) | In this paper we report here on lithographic performance of high resolution, environmentally stable and aqueous base developable positive tone resist for DUV lithography. There have been a lot of efforts to prevent the resist from suffering from the deactivation of acid during the delay time between exposure and post exposure bake(PEB). The new design of matrix resin containing amide functional group has advantages over current lithographic techniques. The effect of amide functional group as a basic additive in a chemically amplified resist was investigated. A new class of matrix resin containing amide functional group, poly(hydroxystyrene-co-t-butyl acrylate-co-3-(t-butoxycarbonyl)-1-vinyl-2-caprolactam), was developed. It showed 0.20μm lines/spaces patterns of this resist using KrF excimer stepper (NA 0.55, partial coherence factor 0.55) with a exposure dose of 25mJ/cm^2. This resist showed no change of pattern profile after 2 hours post exposure delay in which ammonia concentration is 5ppb. 3-(t-butoxycarbonyl)-1-vinyl-2-caprolatam(BCVC) unit as a basic additive can not only solve amine contamination effectively, but also improve the resolution of the resist. BCVC unit reduces the diffusion of acid and it results in sharp contrast at the interface between the exposed and unexposed areas. Therefore, adding BCVC unit in matrix resin leads to the stabilization of the pattern profile and higher resolution. |
| キーワード(和) | |
| キーワード(英) | DUV lithography / CAR photoresist / PED stability / vinyllactam |
| 資料番号 | ICD97-59 |
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| 研究会情報 | |
| 研究会 | ICD |
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| 開催期間 | 1997/7/24(から1日開催) |
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| 講演論文情報詳細 | |
| 申込み研究会 | Integrated Circuits and Devices (ICD) |
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| 本文の言語 | ENG |
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| サブタイトル（和） | |
| タイトル（英） | Environmentally stable chemically amplified positive resist containing vinyllactam terpolymers |
| サブタイトル（和） | |
| キーワード(1)（和/英） | / DUV lithography |
| 第 1 著者 氏名（和/英） | / Min-Ho Jung |
| 第 1 著者 所属（和/英） | Memory R&D Division, Hyundai Electronics Industries Co., Ltd. |
| 発表年月日 | 1997/7/24 |
| 資料番号 | ICD97-59 |
| 巻番号（vol） | vol.97 |
| 号番号（no） | 197 |
| ページ範囲 | pp.- |
| ページ数 | 11 |
| 発行日 | |