| Presentation | 2002/6/14 The Influence of Electrode on the Characteristics of (Ba,Sr)TiO_3 Hiroshi Yamada, Takamaro Kikkawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We investigated the influence of capacitor electrodes on the properties of BST films. Ir, Ru, TiN, Ti, Ta, TaN, and SrRuO_3 were evaluated as capacitor electrodes. It is found that Ta and Ti electrodes improved the crystallinity and grain size of BST films. Ta and Ti electrodes also showed the lower leakage current. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | BST / (Bs,Sr)TiO_3 / capacitor / leakage current / electrode / work function |
| Paper # | SDM2002-64 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2002/6/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The Influence of Electrode on the Characteristics of (Ba,Sr)TiO_3 |
| Sub Title (in English) | |
| Keyword(1) | BST |
| Keyword(2) | (Bs,Sr)TiO_3 |
| Keyword(3) | capacitor |
| Keyword(4) | leakage current |
| Keyword(5) | electrode |
| Keyword(6) | work function |
| 1st Author's Name | Hiroshi Yamada |
| 1st Author's Affiliation | Research Center for Nanodevices and Systems, Hiroshima University() |
| 2nd Author's Name | Takamaro Kikkawa |
| 2nd Author's Affiliation | Research Center for Nanodevices and Systems, Hiroshima University |
| Date | 2002/6/14 |
| Paper # | SDM2002-64 |
| Volume (vol) | vol.102 |
| Number (no) | 134 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |