| Presentation | 2002/6/14 Analysis of Chemical Bonding Features and determination of Energy Band profile for CVD Aluminum Oxynitride/Si(100) Heterostructures Atsushi Suyama, Hirokazu Yokoi, Masahiro Narasaki, Wataru Mizubayashi, Hideki Murakami, Seiichi Miyazaki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The formation of AlO_x:N films on Si(100) from a combination of LPCVD using N_2O+AlH_3:N(CH_3)_2C_2H_5 and NH_3 annealing in a layer-by-layer fashion has been demonstrated. We have examined the interfaces and measured the energy bandgap of ultrathin AlO_x:N and the valence band offset at the interface to determine energy band lineup between AlO_x:N and Si(100) by XPS measurements. We found that the energy bandgap of the AlO_x:N films is decreased slightly with increasing nitrogen content and no significant change in the valence band spectrum between the AlO_x:N/SiN_x/Si(100) heterostructures before and after the O_2 anneal was observable. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlO_x:N films / Layer-by-Layer CVD / XPS |
| Paper # | SDM2002-57 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2002/6/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Analysis of Chemical Bonding Features and determination of Energy Band profile for CVD Aluminum Oxynitride/Si(100) Heterostructures |
| Sub Title (in English) | |
| Keyword(1) | AlO_x:N films |
| Keyword(2) | Layer-by-Layer CVD |
| Keyword(3) | XPS |
| 1st Author's Name | Atsushi Suyama |
| 1st Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University() |
| 2nd Author's Name | Hirokazu Yokoi |
| 2nd Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| 3rd Author's Name | Masahiro Narasaki |
| 3rd Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| 4th Author's Name | Wataru Mizubayashi |
| 4th Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| 5th Author's Name | Hideki Murakami |
| 5th Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| 6th Author's Name | Seiichi Miyazaki |
| 6th Author's Affiliation | Graduate School of Advanced Sciences of Matter, Hiroshima University |
| Date | 2002/6/14 |
| Paper # | SDM2002-57 |
| Volume (vol) | vol.102 |
| Number (no) | 134 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |