| Presentation | 2002/5/17 Investigation of Sputtering Gases on IBS Growth of Si and Ge Takaharu Ikeda, Haruhiko Konta, Makoto Sugino, Kimihiro Sasaki, Tomonobu Hata, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have been growing Si/Ge strained-layer superlattice by ion beam sputtering. First, to improve crystallinity and surface roughness of Si or Ge thin film, we discussed of supttering gasses (Kr or Xe) on IBS growth of Si and Ge. First, we examined sputtering by simulation, particles emitted from Si or Ge target have kinetic energy by Kr or Xe ion lower than by Ar ion. Reduction of kinetic energy of sputtered particle is considered to contribute to prepare better crystallinity, because of low radiation damege. We confirmed the effect of sputtering gas, acttually, Si films with Kikuchi-line were prepared by using Kr and Xe sputtering gas. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ion beam sputtering / Kr / Xe / spettering damege / crystallinity |
| Paper # | SDM2002-36 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2002/5/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Investigation of Sputtering Gases on IBS Growth of Si and Ge |
| Sub Title (in English) | |
| Keyword(1) | ion beam sputtering |
| Keyword(2) | Kr |
| Keyword(3) | Xe |
| Keyword(4) | spettering damege |
| Keyword(5) | crystallinity |
| 1st Author's Name | Takaharu Ikeda |
| 1st Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University() |
| 2nd Author's Name | Haruhiko Konta |
| 2nd Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
| 3rd Author's Name | Makoto Sugino |
| 3rd Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
| 4th Author's Name | Kimihiro Sasaki |
| 4th Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
| 5th Author's Name | Tomonobu Hata |
| 5th Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
| Date | 2002/5/17 |
| Paper # | SDM2002-36 |
| Volume (vol) | vol.102 |
| Number (no) | 81 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |