Presentation 2002/5/17
Growth and electronic properties of thick CdTe layers on GaAs by MOVPE
Yasuhiro Kawauchi, Tomoaki Ishiguro, Hiroshi Morishita, Takashi Mabuchi, Yasunori Agata, Madan Niraula, Kazuhito Yasuda,
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Abstract(in English) Growths and electronic properties of thick CdTe layers (~100 μm) for X- and γ-ray detectors have been studied. CdTe layers were grown by MOVPE on GaAs substrate. Thick CdTe layers were grown by controlling the substrate temperature during growths. Crystallinities of CdTe layers were improved with increase of the CdTe thickness. The best full width at half maximum (FWHM) value of 45 arcsec. was obtained for thickness of 50 μm, which was comparable with that for high quality bulk CdTe. High crystallinities of obtained CdTe layers were also confirmed by photoluminescence measurements at 4.2 K. Grown layers showed rapid relaxations of compressive stress from 0 to 20 μm. The compressive stress, however, remained above 50 μm. Obtained results showed that high quality thick CdTe layers were grown by MOVPE on GaAs substrates.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) MOVPE / X-and γ-ray detector / thick CdTe layers / growth characteristics / electronic properties
Paper # SDM2002-28
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Conference Information
Committee SDM
Conference Date 2002/5/17(1days)
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Paper Information
Registration To Silicon Device and Materials (SDM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Growth and electronic properties of thick CdTe layers on GaAs by MOVPE
Sub Title (in English)
Keyword(1) MOVPE
Keyword(2) X-and γ-ray detector
Keyword(3) thick CdTe layers
Keyword(4) growth characteristics
Keyword(5) electronic properties
1st Author's Name Yasuhiro Kawauchi
1st Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology()
2nd Author's Name Tomoaki Ishiguro
2nd Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
3rd Author's Name Hiroshi Morishita
3rd Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
4th Author's Name Takashi Mabuchi
4th Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
5th Author's Name Yasunori Agata
5th Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
6th Author's Name Madan Niraula
6th Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
7th Author's Name Kazuhito Yasuda
7th Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
Date 2002/5/17
Paper # SDM2002-28
Volume (vol) vol.102
Number (no) 81
Page pp.pp.-
#Pages 6
Date of Issue