| Presentation | 2001/12/13 Fabrication of SiC Super Junction Structure and Analysis of Electrical Characteristics for Power Devices Mineo Miura, Shun-ichi Nakamura, Tsunenobu Kimoto, Jun Suda, Hiroyuki Matsunami, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In Si power devices, a new type of structure called Super Junction(SJ)has been proposed to reduce on-resistance. SiC is an attractive wide band gap semiconductor with high breakdown field. By applying the SJ structure to SiC, it is expected to achieve ultra low on-resistance for high voltage devices. Optimization of SiC SJ structure and analysis of SiC SJ device characteristics are performed using a device simulator. SiC SJ structure was fabricated by CVD growth. The SJ structure with uniform layer thickness and abrupt doping profile was realized. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | silicon carbide / super junction / power device |
| Paper # | SDM2001-197 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2001/12/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of SiC Super Junction Structure and Analysis of Electrical Characteristics for Power Devices |
| Sub Title (in English) | |
| Keyword(1) | silicon carbide |
| Keyword(2) | super junction |
| Keyword(3) | power device |
| 1st Author's Name | Mineo Miura |
| 1st Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University() |
| 2nd Author's Name | Shun-ichi Nakamura |
| 2nd Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University |
| 3rd Author's Name | Tsunenobu Kimoto |
| 3rd Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University |
| 4th Author's Name | Jun Suda |
| 4th Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University |
| 5th Author's Name | Hiroyuki Matsunami |
| 5th Author's Affiliation | Department of Electronic Science and Engineering, Kyoto University |
| Date | 2001/12/13 |
| Paper # | SDM2001-197 |
| Volume (vol) | vol.101 |
| Number (no) | 515 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |