Presentation 2001/6/30
Development of a RF Bipolar Transistor in a Standard 0.35μm CMOS Technology
I-Shan Michael Sun, Wai Tung Ng, Philip K.T. Mok, Hidenori Mochizuki, Katsumi Shinomura, Hisaya Imai, Akira Ishikawa, Nobuo Saito, Kiyoshi Miyashita, Satoru Tamura, Kaoru Takasuka,
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Abstract(in English) A RF Bipolar Transistor integrated to a standard 0.35μm CMOS process is presented. This BiCMOS technology features a single-poly NPN transistor with simulated performance of ƒ_T=16GHz and BV_=6.4V. With implanted base and no trench isolation, this device offers full compatibility with standard CMOS technology at the cost of three additional mask layers, while demonstrates good performance compared to previously published BiCMOS technologies.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) 0.35μm CMOS Technology / RF Silicon Bipolar Transistor / cutoff frequency ƒ_T
Paper # ED2001-100,SDM2001-107
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Committee SDM
Conference Date 2001/6/30(1days)
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Registration To Silicon Device and Materials (SDM)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Development of a RF Bipolar Transistor in a Standard 0.35μm CMOS Technology
Sub Title (in English)
Keyword(1) 0.35μm CMOS Technology
Keyword(2) RF Silicon Bipolar Transistor
Keyword(3) cutoff frequency ƒ_T
1st Author's Name I-Shan Michael Sun
1st Author's Affiliation University of Toronto, Dept.of Elec.& Comp.Engineering()
2nd Author's Name Wai Tung Ng
2nd Author's Affiliation University of Toronto, Dept.of Elec.& Comp.Engineering
3rd Author's Name Philip K.T. Mok
3rd Author's Affiliation Hong Kong University of Science & Technology, Elec.Engineering
4th Author's Name Hidenori Mochizuki
4th Author's Affiliation Asahi Kasei Microsystems Co., Ltd.
5th Author's Name Katsumi Shinomura
5th Author's Affiliation Asahi Kasei Microsystems Co., Ltd.
6th Author's Name Hisaya Imai
6th Author's Affiliation Asahi Kasei Microsystems Co., Ltd.
7th Author's Name Akira Ishikawa
7th Author's Affiliation Asahi Kasei Microsystems Co., Ltd.
8th Author's Name Nobuo Saito
8th Author's Affiliation Asahi Kasei Microsystems Co., Ltd.
9th Author's Name Kiyoshi Miyashita
9th Author's Affiliation Asahi Kasei Microsystems Co., Ltd.
10th Author's Name Satoru Tamura
10th Author's Affiliation Asahi Kasei Microsystems Co., Ltd.
11th Author's Name Kaoru Takasuka
11th Author's Affiliation Asahi Kasei Microsystems Co., Ltd.
Date 2001/6/30
Paper # ED2001-100,SDM2001-107
Volume (vol) vol.101
Number (no) 165
Page pp.pp.-
#Pages 7
Date of Issue