Presentation 2001/6/30
Microwave Power Performance of AlGaN/GaN Heterojunction FETs
M. Kuzuhara, N. Hayama, Y. Ando, K. Kunihiro, K. Kasahara, Y. Okamoto, K. Matsunaga, T. Nakayama, Y. Ohno, H. Miyamoto,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Microwave power performance of an AlGaN/GaN heterojunction FET fabricated on a sapphire substrate is described. Device fabrication processes, including mechanical thinning technique of the substrate, are presented. The fabricated power AlGaN/GaN FET with a thinned sapphire substrate down to 50μm exhibited no trace of degradation in the device performance and delivered an output power of 13.9W with a power-added efficiency of 28.4% at 1.95GHz. The results of a full-band ensemble Monte Carlo simulation predicted a current gain cutoff frequency of 170GHz and a power density of 26W/mm with a gate length of 0.1μm. The prospects of millimeter-wave high-power applications will be discussed.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) AlGaN/GaN / heterojunction / FET / Power device / Sapphire substrate
Paper # ED2001-96,SDM2001-103
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Committee SDM
Conference Date 2001/6/30(1days)
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Registration To Silicon Device and Materials (SDM)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Microwave Power Performance of AlGaN/GaN Heterojunction FETs
Sub Title (in English)
Keyword(1) AlGaN/GaN
Keyword(2) heterojunction
Keyword(3) FET
Keyword(4) Power device
Keyword(5) Sapphire substrate
1st Author's Name M. Kuzuhara
1st Author's Affiliation Photonic and Wireless Devices Research laboratories, NEC Corporation()
2nd Author's Name N. Hayama
2nd Author's Affiliation Photonic and Wireless Devices Research laboratories, NEC Corporation
3rd Author's Name Y. Ando
3rd Author's Affiliation Photonic and Wireless Devices Research laboratories, NEC Corporation
4th Author's Name K. Kunihiro
4th Author's Affiliation Photonic and Wireless Devices Research laboratories, NEC Corporation
5th Author's Name K. Kasahara
5th Author's Affiliation Photonic and Wireless Devices Research laboratories, NEC Corporation
6th Author's Name Y. Okamoto
6th Author's Affiliation Photonic and Wireless Devices Research laboratories, NEC Corporation
7th Author's Name K. Matsunaga
7th Author's Affiliation Photonic and Wireless Devices Research laboratories, NEC Corporation
8th Author's Name T. Nakayama
8th Author's Affiliation Photonic and Wireless Devices Research laboratories, NEC Corporation
9th Author's Name Y. Ohno
9th Author's Affiliation Photonic and Wireless Devices Research laboratories, NEC Corporation
10th Author's Name H. Miyamoto
10th Author's Affiliation Photonic and Wireless Devices Research laboratories, NEC Corporation
Date 2001/6/30
Paper # ED2001-96,SDM2001-103
Volume (vol) vol.101
Number (no) 165
Page pp.pp.-
#Pages 6
Date of Issue