Presentation | 2001/6/30 The InP-HEMT IC Technology for 40-Gbit/s Optical Communications Yasuro Yamane, Takatomo Enoki, Koichi Murata, Yohtaro Umeda, Yoshino K. Fukai, Suehiro Sugitani, Hiroto Kitabayashi, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The InP-HEMT IC technology is outlined. This technology realize the integration of 0.1 um gate length HEMTs, vertical diodes, capacitors and WSiN resistors with two level interconnections. The InP-HEMT degradation mode is investigated. The increase in Rd is the critical condition for 100 C use. InAlP-CSL(carrier supply layer)-HEMTs have 100 times longer lifetime than the usual InAlAs-CSL-HEMTs. This HEMT lifetime is 10^7 hours at 100 C. This technology realizes 43 Gbit/s operating SSIs and MSIs with practical yield, successfully. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | compound semiconductor / InP / InAlP / InAlAs / GaInAs / IC / HEMT |
Paper # | ED2001-95,SDM2001-102 |
Date of Issue |
Conference Information | |
Committee | SDM |
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Conference Date | 2001/6/30(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | The InP-HEMT IC Technology for 40-Gbit/s Optical Communications |
Sub Title (in English) | |
Keyword(1) | compound semiconductor |
Keyword(2) | InP |
Keyword(3) | InAlP |
Keyword(4) | InAlAs |
Keyword(5) | GaInAs |
Keyword(6) | IC |
Keyword(7) | HEMT |
1st Author's Name | Yasuro Yamane |
1st Author's Affiliation | NTT Photonics Laboratories() |
2nd Author's Name | Takatomo Enoki |
2nd Author's Affiliation | NTT Photonics Laboratories |
3rd Author's Name | Koichi Murata |
3rd Author's Affiliation | NTT Photonics Laboratories |
4th Author's Name | Yohtaro Umeda |
4th Author's Affiliation | NTT Photonics Laboratories |
5th Author's Name | Yoshino K. Fukai |
5th Author's Affiliation | NTT Photonics Laboratories |
6th Author's Name | Suehiro Sugitani |
6th Author's Affiliation | NTT Photonics Laboratories |
7th Author's Name | Hiroto Kitabayashi |
7th Author's Affiliation | NTT Photonics Laboratories |
Date | 2001/6/30 |
Paper # | ED2001-95,SDM2001-102 |
Volume (vol) | vol.101 |
Number (no) | 165 |
Page | pp.pp.- |
#Pages | 8 |
Date of Issue |