| Presentation | 2001/4/13 A High Performance TFT and its Subject Takashi NOGUCHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | TFT performance and relating subject are discussed from a viewpoint of device structure, material and fabrication process. Crystallized Si TFTs are applied not only to stacked SRAMs but also to displays such as LCD or ELD etc. by adopting a technique such as SPC or ELA. Although the improvement of device characteristics such as an enhancement of carrier mobility or a reduction of leakage current are under going, issues such as a uniformity of the device characteristics become more important relating to the reduction of driving voltage or the shrinkage of device size. The improvement of TFTs, a proposal for attaining the uniformity, relating fundamental result and/or its possibility are described. By settling the issues, coming SOP era using TFTs should be expected. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | TFT / polySi / LCD / ELD / SPC / ELA / SOP |
| Paper # | ED2001-11,SDM2001-11 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2001/4/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A High Performance TFT and its Subject |
| Sub Title (in English) | |
| Keyword(1) | TFT |
| Keyword(2) | polySi |
| Keyword(3) | LCD |
| Keyword(4) | ELD |
| Keyword(5) | SPC |
| Keyword(6) | ELA |
| Keyword(7) | SOP |
| 1st Author's Name | Takashi NOGUCHI |
| 1st Author's Affiliation | () |
| Date | 2001/4/13 |
| Paper # | ED2001-11,SDM2001-11 |
| Volume (vol) | vol.101 |
| Number (no) | 17 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |