| Presentation | 2001/4/12 Thin-Film Transistors Fabricated by Catalytic Chemical Vapor Deposition Method Masahiro Sakai, Takayuki Tsutsumi, Atsushi Masuda, Hideki Matsumura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed amorphous silicon thin-film transistors (TFT's) by the catalytic chemical vapor deposition (Cat-CVD) method. The amorphous silicon films deposited at a high rate (1.9 nm s^<-1>) show low spin density (1.6×10^<16>cm^<-3>) measured by electron spin resonance. TFT's, with a field effect mobility about 0.85 cm^2V^<-1>s^<-1>, are obtained with the gate SiN_x and phosphorous-doped amorphous silicon layers also fabricated by Cat-CVD even when the TFT's are fabricated by back channel etching process. The bias stress test has been performed on the TFT samples with SiO_2 as gate dielectric. The stress tolerance is very high, showing that the TFT's are suitable for operating the organic electroluminescence displays. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | catalytic CVD (Cat-CVD, hot-wire CVD) / amorphous silicon / high rate deposition / thin-film transistor |
| Paper # | ED2001-5,SDM2001-5 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2001/4/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Thin-Film Transistors Fabricated by Catalytic Chemical Vapor Deposition Method |
| Sub Title (in English) | |
| Keyword(1) | catalytic CVD (Cat-CVD, hot-wire CVD) |
| Keyword(2) | amorphous silicon |
| Keyword(3) | high rate deposition |
| Keyword(4) | thin-film transistor |
| 1st Author's Name | Masahiro Sakai |
| 1st Author's Affiliation | JAIST(Japan Advanced Institute of Science and Technology)() |
| 2nd Author's Name | Takayuki Tsutsumi |
| 2nd Author's Affiliation | JAIST(Japan Advanced Institute of Science and Technology) |
| 3rd Author's Name | Atsushi Masuda |
| 3rd Author's Affiliation | JAIST(Japan Advanced Institute of Science and Technology) |
| 4th Author's Name | Hideki Matsumura |
| 4th Author's Affiliation | JAIST(Japan Advanced Institute of Science and Technology) |
| Date | 2001/4/12 |
| Paper # | ED2001-5,SDM2001-5 |
| Volume (vol) | vol.101 |
| Number (no) | 16 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |