| Presentation | 2001/5/31 The Influence of Electrodes on the Characteristics of (Ba,Sr)TiO_3 N. Fujiwara, H. Yamada, T. Kidera, S. Miyazaki, F. Nishiyama, T. Kikkawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | (Ba,Sr)TiO_3 (BST) is regarded as a promising candidate for a capacitor material for ultra-large scale dynamic random acccss memories. However, BST films have leakage current problems due to metal electrodes. From this point of view, the choice of metal electrodes becomes important. In this research, the dependence of electrode metals is investigated in terms of leakage current in (Ba,Sr)TiO_3 films. Ir, Ru, TiN and Al are investigated as metal electrodes which have difrerent work functions. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | DRAM / (Ba,Sr)TiO_3 / electrode / work function |
| Paper # | SDM2001-52 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2001/5/31(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The Influence of Electrodes on the Characteristics of (Ba,Sr)TiO_3 |
| Sub Title (in English) | |
| Keyword(1) | DRAM |
| Keyword(2) | (Ba,Sr)TiO_3 |
| Keyword(3) | electrode |
| Keyword(4) | work function |
| 1st Author's Name | N. Fujiwara |
| 1st Author's Affiliation | Research Center for Nanodevice and System, Hiroshima University() |
| 2nd Author's Name | H. Yamada |
| 2nd Author's Affiliation | Research Center for Nanodevice and System, Hiroshima University |
| 3rd Author's Name | T. Kidera |
| 3rd Author's Affiliation | Research Center for Nanodevice and System, Hiroshima University |
| 4th Author's Name | S. Miyazaki |
| 4th Author's Affiliation | Department of Electrical Engineering, Hiroshima University |
| 5th Author's Name | F. Nishiyama |
| 5th Author's Affiliation | Radiation Research Facility, Hiroshima University |
| 6th Author's Name | T. Kikkawa |
| 6th Author's Affiliation | Research Center for Nanodevice and System, Hiroshima University |
| Date | 2001/5/31 |
| Paper # | SDM2001-52 |
| Volume (vol) | vol.101 |
| Number (no) | 107 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |