| Presentation | 2001/5/18 MBE growth of GeC using arc plasma gun for a C molecular beam Motoki Okinaka, Ryoichi Dansho, Yasumasa Hamana, Takashi Tokuda, Jun Ohta, Masahiro Nunoshita, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | An arc plasma gun was applied for a new C source in molecular beam epitaxiy (MBE). Basic properties of this C source have been characterized and GeC epilayers on Ge substrates were grown. C layers deposited by the arc plasma gun have few micro-particles which deteriorate device performance. The growth modes of the GeC epilayers were dependent on the C fraction. It is confirmed that most of the supplied C atoms are incorporated in the GeC alloys. Therefore the arc plasma gun is a promising C source for the MBE growth of GeC alloys. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Arc plasma gun / GeC / micro-particle / C cluster / 3D growth / C segregation |
| Paper # | ED2001-33,CPM2001-20,SDM2001-33 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2001/5/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | MBE growth of GeC using arc plasma gun for a C molecular beam |
| Sub Title (in English) | |
| Keyword(1) | Arc plasma gun |
| Keyword(2) | GeC |
| Keyword(3) | micro-particle |
| Keyword(4) | C cluster |
| Keyword(5) | 3D growth |
| Keyword(6) | C segregation |
| 1st Author's Name | Motoki Okinaka |
| 1st Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology() |
| 2nd Author's Name | Ryoichi Dansho |
| 2nd Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology:(Present address) SONY corp. |
| 3rd Author's Name | Yasumasa Hamana |
| 3rd Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology |
| 4th Author's Name | Takashi Tokuda |
| 4th Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology |
| 5th Author's Name | Jun Ohta |
| 5th Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology |
| 6th Author's Name | Masahiro Nunoshita |
| 6th Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology |
| Date | 2001/5/18 |
| Paper # | ED2001-33,CPM2001-20,SDM2001-33 |
| Volume (vol) | vol.101 |
| Number (no) | 83 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |