Presentation | 2001/5/18 MBE growth of GeC using arc plasma gun for a C molecular beam Motoki Okinaka, Ryoichi Dansho, Yasumasa Hamana, Takashi Tokuda, Jun Ohta, Masahiro Nunoshita, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | An arc plasma gun was applied for a new C source in molecular beam epitaxiy (MBE). Basic properties of this C source have been characterized and GeC epilayers on Ge substrates were grown. C layers deposited by the arc plasma gun have few micro-particles which deteriorate device performance. The growth modes of the GeC epilayers were dependent on the C fraction. It is confirmed that most of the supplied C atoms are incorporated in the GeC alloys. Therefore the arc plasma gun is a promising C source for the MBE growth of GeC alloys. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Arc plasma gun / GeC / micro-particle / C cluster / 3D growth / C segregation |
Paper # | ED2001-33,CPM2001-20,SDM2001-33 |
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Conference Information | |
Committee | SDM |
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Conference Date | 2001/5/18(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | MBE growth of GeC using arc plasma gun for a C molecular beam |
Sub Title (in English) | |
Keyword(1) | Arc plasma gun |
Keyword(2) | GeC |
Keyword(3) | micro-particle |
Keyword(4) | C cluster |
Keyword(5) | 3D growth |
Keyword(6) | C segregation |
1st Author's Name | Motoki Okinaka |
1st Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology() |
2nd Author's Name | Ryoichi Dansho |
2nd Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology:(Present address) SONY corp. |
3rd Author's Name | Yasumasa Hamana |
3rd Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology |
4th Author's Name | Takashi Tokuda |
4th Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology |
5th Author's Name | Jun Ohta |
5th Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology |
6th Author's Name | Masahiro Nunoshita |
6th Author's Affiliation | Graduate School of Materials Science, Nara Institute of Science and Technology |
Date | 2001/5/18 |
Paper # | ED2001-33,CPM2001-20,SDM2001-33 |
Volume (vol) | vol.101 |
Number (no) | 83 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |