| Presentation | 2001/5/18 A technique of keeping off the oxidation of Mn evaporant during reactive evaporation Masaaki Isai, Takeyoshi Shimada, Takaaki Matsui, Hiroshi Fujiyasu, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Manganese oxide films have been focused for the positive electrode in the Li secondary batteries. One of the problems is the oxidation of Mn evaporant during the reactive evaporation process. We developed a new cell which successfully keeps off the oxidation of Mn evaporant. The cell performance was evaluated. The reproducibility of the deposition rate was improved by this method. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Li secondary batteries / Manganese oxide films / Li-Mn spinel structure / Reactive evaporation |
| Paper # | ED2001-30,CPM2001-17,SDM2001-30 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2001/5/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A technique of keeping off the oxidation of Mn evaporant during reactive evaporation |
| Sub Title (in English) | |
| Keyword(1) | Li secondary batteries |
| Keyword(2) | Manganese oxide films |
| Keyword(3) | Li-Mn spinel structure |
| Keyword(4) | Reactive evaporation |
| 1st Author's Name | Masaaki Isai |
| 1st Author's Affiliation | Department of Electrical & Electronics, Faculty of Engineering, Shizuoka University() |
| 2nd Author's Name | Takeyoshi Shimada |
| 2nd Author's Affiliation | Department of Electrical & Electronics, Faculty of Engineering, Shizuoka University |
| 3rd Author's Name | Takaaki Matsui |
| 3rd Author's Affiliation | Department of Electrical & Electronics, Faculty of Engineering, Shizuoka University |
| 4th Author's Name | Hiroshi Fujiyasu |
| 4th Author's Affiliation | Department of Electrical & Electronics, Faculty of Engineering, Shizuoka University |
| Date | 2001/5/18 |
| Paper # | ED2001-30,CPM2001-17,SDM2001-30 |
| Volume (vol) | vol.101 |
| Number (no) | 83 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |