| Presentation | 2001/3/6 Degradation of Pt/PLZT/Pt Capacitors Caused by Hydroxyl Group in Interlayer Dielectrics Kazufumi Suenaga, Kiyoshi Ogata, Hiromichi Waki, Mitsuhiro Mori, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A correlation between ferroelectric properties of the Pt/PLZT/Pt capacitors and amount of H_2 and H_2O gasses desorbed from interlayer dielectrics were investigated quantitatively. H_2 and H_2O gasses were analyzed using thermal desorption spectroscopy. Polarization charges and its aging characteristics of memory array capacitors with area of 2μm squares did not depend on amount of desorbed H_2 explicitly, but strongly on H_2O desorption. It is considered that hydrogen atoms were mainly dissociated from H_2O molecules by catalytic activities of Pt top electrodes. Precise control of hydroxyl groups contained in interlayer dielectrics and passivation films resulted in very small retention degradation caused by imprint phenomena, and realized high reliability and high density FRAM technologies. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ferroelectric / PLZT / imprint / dielectrics / hydroxyl group / TDS |
| Paper # | SDM2000-239 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2001/3/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Degradation of Pt/PLZT/Pt Capacitors Caused by Hydroxyl Group in Interlayer Dielectrics |
| Sub Title (in English) | |
| Keyword(1) | ferroelectric |
| Keyword(2) | PLZT |
| Keyword(3) | imprint |
| Keyword(4) | dielectrics |
| Keyword(5) | hydroxyl group |
| Keyword(6) | TDS |
| 1st Author's Name | Kazufumi Suenaga |
| 1st Author's Affiliation | Production Engineering Research Laboratory, Hitachi, Ltd.() |
| 2nd Author's Name | Kiyoshi Ogata |
| 2nd Author's Affiliation | Production Engineering Research Laboratory, Hitachi, Ltd. |
| 3rd Author's Name | Hiromichi Waki |
| 3rd Author's Affiliation | Semiconductor and Integrated Circuits, Hitachi, Ltd. |
| 4th Author's Name | Mitsuhiro Mori |
| 4th Author's Affiliation | Semiconductor and Integrated Circuits, Hitachi, Ltd. |
| Date | 2001/3/6 |
| Paper # | SDM2000-239 |
| Volume (vol) | vol.100 |
| Number (no) | 653 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |