Presentation 2001/3/5
Analysis of Retention Characteristics of MFIS and MIFIS Structures
Mitsue Takahashi, Kazushi Kodama, Minoru Noda, Masanori Okuyama,
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Abstract(in English) Retention characteristics of metal-ferroelectric-insulator-semiconductor (MFIS) and metal-insulator-ferroelectric-insulator-semiconductor (M-I-FIS) structures have been investigated both theoretically and experimentally. The simulated time dependence of capacitance for the MFIS has indicated that reducing currents through the ferroelectric and the insulator layers improves the retention characteristics of the capacitance more effectively than choosing the insulators with larger dielectric constants. The M-I-FIS structure has been studied in order to reduce the charge injection between the metal and the ferroelectric layer in the MFIS. The simulations have indicated that the M-I-FIS can provide much longer retention time than the original MFIS, although the experimentally obtained retention time for the M-I-FIS seems only a little improved as compared to that of the MFIS.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Ferroelectric / Memory device / MFIS / Retention characteristic
Paper # SDM2000-232
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Conference Information
Committee SDM
Conference Date 2001/3/5(1days)
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Paper Information
Registration To Silicon Device and Materials (SDM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Analysis of Retention Characteristics of MFIS and MIFIS Structures
Sub Title (in English)
Keyword(1) Ferroelectric
Keyword(2) Memory device
Keyword(3) MFIS
Keyword(4) Retention characteristic
1st Author's Name Mitsue Takahashi
1st Author's Affiliation Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering Science, Osaka University()
2nd Author's Name Kazushi Kodama
2nd Author's Affiliation Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering Science, Osaka University
3rd Author's Name Minoru Noda
3rd Author's Affiliation Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering Science, Osaka University
4th Author's Name Masanori Okuyama
4th Author's Affiliation Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering Science, Osaka University
Date 2001/3/5
Paper # SDM2000-232
Volume (vol) vol.100
Number (no) 652
Page pp.pp.-
#Pages 6
Date of Issue