| Presentation | 2001/2/21 Selective formation of site-controlled metal nanostructures o epitaxial fluoride films Satoshi Yamada, Fumihito Hirabayashi, Kazuo Tsutsui, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Epitaxial CaF_2 films grown on Si substrates were exposed to an focused electron beam directly, and after that, Ga or Al were supplied on the surface so that nanostructures of these metals were spontaneously formed on the exposed sites. Al was fond to be superior to Ga for formation of structures not only dot array structures but also wire structures. This is because wettability of Al is better on the beam exposed CaF_2 surfaces. The other improved process using regrowth of CaF_2 was investigated as well, and it was found that this process provided good selectivity on formation of high density Ga dot array structures. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | quantum dot / quantum wire / electron beam / site control / CaF_2 / Ga / Al |
| Paper # | ED2000-247,SDM2000-201 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2001/2/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Selective formation of site-controlled metal nanostructures o epitaxial fluoride films |
| Sub Title (in English) | |
| Keyword(1) | quantum dot |
| Keyword(2) | quantum wire |
| Keyword(3) | electron beam |
| Keyword(4) | site control |
| Keyword(5) | CaF_2 |
| Keyword(6) | Ga |
| Keyword(7) | Al |
| 1st Author's Name | Satoshi Yamada |
| 1st Author's Affiliation | Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology() |
| 2nd Author's Name | Fumihito Hirabayashi |
| 2nd Author's Affiliation | Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology |
| 3rd Author's Name | Kazuo Tsutsui |
| 3rd Author's Affiliation | Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology |
| Date | 2001/2/21 |
| Paper # | ED2000-247,SDM2000-201 |
| Volume (vol) | vol.100 |
| Number (no) | 643 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |