| Presentation | 2001/2/21 Fabrication of c-Si/SiO_2 low dimensional structure using selective epitaxial growth by gas source molecular beam epitaxy Toru SEGAWA, Satoru MATSUMOTO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We proposed the very simple process for fabricating c-Si/SiO_2 low dimensional structure(zero or one dimensional system)using selective epitaxial growth by Si-GSMBE which has very accurate film-thickness controllability, and isotropic wet etching with Electron Beam lithography. Also, we investigated the crystal structure, the uniformity of crystal, and the mechanism of crystal growth by using AFM, FE-SEM, and HR-TEM. Finally, optical properties of c-Si/SiO_2 crystal structures with controlled size, density, and period were evaluated by Cathodo-Luminescence(CL). |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GS-MBE / selective epitaxial growth / low dimensional structure / optical properties / CL |
| Paper # | ED2000-243,SDM2000-197 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2001/2/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of c-Si/SiO_2 low dimensional structure using selective epitaxial growth by gas source molecular beam epitaxy |
| Sub Title (in English) | |
| Keyword(1) | GS-MBE |
| Keyword(2) | selective epitaxial growth |
| Keyword(3) | low dimensional structure |
| Keyword(4) | optical properties |
| Keyword(5) | CL |
| 1st Author's Name | Toru SEGAWA |
| 1st Author's Affiliation | Department of Electronics and Electrical Engineering, Keio University() |
| 2nd Author's Name | Satoru MATSUMOTO |
| 2nd Author's Affiliation | Department of Electronics and Electrical Engineering, Keio University |
| Date | 2001/2/21 |
| Paper # | ED2000-243,SDM2000-197 |
| Volume (vol) | vol.100 |
| Number (no) | 643 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |