| Presentation | 2000/12/14 Mechanism of Device Degradation due to Dynamic Stress in Poly-Si TFTs Yoshiaki Toyota, Takeo Shiba, Makoto Ohkura, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Properties of device degradation due to dynamic stress are studied on the laser-crystallized poly-Si TFTs. It has been found that the degradation of single drain TFTs is enhanced by dynamic stress and the enhancement depends on the falling time and the frequency of stress pulse. On the other hand, the enhancement of LDD TFTs is less occurred and the degradation is dominated by accumulative DAHC stress time. In addition, The mechanism of device degradation due to dynamic stress is considered in the basis of experimental results. The enhancement of degradation due to dynamic stress is probably caused by the accelerated DAHC stress greatly affected by transitional increase of carrier concentration. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Poly-Si TFTs / Dynamic stress / Enhancement of degradation / DAHC stress / Accumulative time |
| Paper # | SDM2000-181 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2000/12/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Mechanism of Device Degradation due to Dynamic Stress in Poly-Si TFTs |
| Sub Title (in English) | |
| Keyword(1) | Poly-Si TFTs |
| Keyword(2) | Dynamic stress |
| Keyword(3) | Enhancement of degradation |
| Keyword(4) | DAHC stress |
| Keyword(5) | Accumulative time |
| 1st Author's Name | Yoshiaki Toyota |
| 1st Author's Affiliation | Hitachi, Ltd., Hitachi Research Laboratory., Hitachi, Ltd., Displays() |
| 2nd Author's Name | Takeo Shiba |
| 2nd Author's Affiliation | Hitachi, Ltd., Hitachi Research Laboratory., Hitachi, Ltd., Displays |
| 3rd Author's Name | Makoto Ohkura |
| 3rd Author's Affiliation | Hitachi, Ltd., Hitachi Research Laboratory., Hitachi, Ltd., Displays |
| Date | 2000/12/14 |
| Paper # | SDM2000-181 |
| Volume (vol) | vol.100 |
| Number (no) | 517 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |