Presentation | 2000/5/12 Study on the LPE growth of InGaAs pyramidal layers on(100)GaAs substrates K. Balakrishnan, S. Iida, T. Koyama, M. Kumagawa, Y. Hayakawa, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Growth of In_xGa_<1-x>As(x=0.06)layers on various types of patterned(100)GaAs substrates by liquid phase epitaxy(LPE) has been investigated. Non-planar InGaAs layer having filled tent-like structure was growth on non-patterned substrate. When the InGaAs was grown on circular patterned substrate, a non-hollow pyramid structure was obtained. Perfect hollow pyramid structured InGaAs was found to be grown on trench-substrates of(100)GaAs. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | LPE / InGaAs / (100)GaAs substrate / pyramid structure |
Paper # | ED2000-43,CPM2000-28,SDM2000-43 |
Date of Issue |
Conference Information | |
Committee | SDM |
---|---|
Conference Date | 2000/5/12(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Study on the LPE growth of InGaAs pyramidal layers on(100)GaAs substrates |
Sub Title (in English) | |
Keyword(1) | LPE |
Keyword(2) | InGaAs |
Keyword(3) | (100)GaAs substrate |
Keyword(4) | pyramid structure |
1st Author's Name | K. Balakrishnan |
1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
2nd Author's Name | S. Iida |
2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
3rd Author's Name | T. Koyama |
3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
4th Author's Name | M. Kumagawa |
4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
5th Author's Name | Y. Hayakawa |
5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
Date | 2000/5/12 |
Paper # | ED2000-43,CPM2000-28,SDM2000-43 |
Volume (vol) | vol.100 |
Number (no) | 62 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |