| Presentation | 2000/5/12 SiC thin films deposition by plasma CVD H. Nonaka, T. Muramatsu, Y. Xu, H. Anma, T. Aoki, Y. Hatanaka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The plastic material is used for various purposes. However, it deteriorates by ultraviolet ray, and is weak for mechanical strength. Therefore, Characteristics of the protection of the plastic surface have been investigated by coating SiC thin film on the plastic. Films were deposited by cathode plasma CVD method using hexamethyledisilane(HMDS, Si_2(CH_3)_6). SiC films were developed high quality by using the stainless mesh. Resistant of the plastic for UV light was increased by coating the SiC film. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Plasma CVD / Hexamethyldisilane / SiC film / Stainless mesh |
| Paper # | ED2000-38,CPM2000-23,SDM2000-38 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2000/5/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | SiC thin films deposition by plasma CVD |
| Sub Title (in English) | |
| Keyword(1) | Plasma CVD |
| Keyword(2) | Hexamethyldisilane |
| Keyword(3) | SiC film |
| Keyword(4) | Stainless mesh |
| 1st Author's Name | H. Nonaka |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | T. Muramatsu |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Y. Xu |
| 3rd Author's Affiliation | Graduate School of Electronic Science and Technology, Shizuoka University |
| 4th Author's Name | H. Anma |
| 4th Author's Affiliation | KOITO Manufacturing co., ltd. |
| 5th Author's Name | T. Aoki |
| 5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 6th Author's Name | Y. Hatanaka |
| 6th Author's Affiliation | Research Institute of Electronics, Shizuoka University:Graduate School of Electronic Science and Technology, Shizuoka University |
| Date | 2000/5/12 |
| Paper # | ED2000-38,CPM2000-23,SDM2000-38 |
| Volume (vol) | vol.100 |
| Number (no) | 62 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |