講演名 | 2000/6/21 ED2000-44 / SDM2000-44 A Study on the Characteristics of High Performance Self-Aligned Asymmetric Structure (SAAS) , |
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抄録(和) | |
抄録(英) | A newly developed Self-Aligned Asymmetric Structure (SAAS) which has the asymmetric halo at the highly doped source extension has been designed and investigated for high performance and reliability. Proposed fabrication process for the asymmetric structure enables the source / drain and channel to be designed independently without additional masking steps. The hydrodynamic device simulation coupled with the process simulation shows that the highly doped asymmetric halo enhances velocity overshoot at source side and effectively suppresses short channel effects. The degradation of driving capability due to increased resistance in the highly doped asymmetric halo is effectively reduced by employing highly doped asymmetric source extension without sacrificing hot carrier reliability. |
キーワード(和) | |
キーワード(英) | Asymmetric structure / Self-aligned / Velocity overshoot / Device simulation |
資料番号 | ED2000-44,SDM2000-44 |
発行日 |
研究会情報 | |
研究会 | SDM |
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開催期間 | 2000/6/21(から1日開催) |
開催地(和) | |
開催地(英) | |
テーマ(和) | |
テーマ(英) | |
委員長氏名(和) | |
委員長氏名(英) | |
副委員長氏名(和) | |
副委員長氏名(英) | |
幹事氏名(和) | |
幹事氏名(英) | |
幹事補佐氏名(和) | |
幹事補佐氏名(英) |
講演論文情報詳細 | |
申込み研究会 | Silicon Device and Materials (SDM) |
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本文の言語 | ENG |
タイトル(和) | |
サブタイトル(和) | |
タイトル(英) | ED2000-44 / SDM2000-44 A Study on the Characteristics of High Performance Self-Aligned Asymmetric Structure (SAAS) |
サブタイトル(和) | |
キーワード(1)(和/英) | / Asymmetric structure |
第 1 著者 氏名(和/英) | / Chang-Soon Choi |
第 1 著者 所属(和/英) | Department of Electrical and Computer Engineering, Yonsei University |
発表年月日 | 2000/6/21 |
資料番号 | ED2000-44,SDM2000-44 |
巻番号(vol) | vol.100 |
号番号(no) | 150 |
ページ範囲 | pp.- |
ページ数 | 6 |
発行日 |