| Presentation | 2000/3/9 Preparation and Properties of Bi_2SiO_5/Si Structures Kouji Hiraki, Masaki Yamaguchi, Takao Nagatomo, Yoichiro Masuda, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Bismuth silicate (Bi_2SiO_5) films, expected as the buffer layer between the Bismuth Layer-Structured Ferroelectrics (BLSF) and silicon substrate, were prepared n (100)-oriented silicon wafers by rf magnetron sputtering and metal-organic deposition methods. The c-axis-oriented Bi_2SiO_5 films obtained both deposition techniques. The carbon atoms were exists approximately 1-2 atom.% in the films by metal-organic deposition. On the other hand, the sputtered films were not include the carbon atoms, and have lower leakage current density of approximately 10~<11> A cm~2 and the interface trap density of 6x10~<12> cm~<-2> eV~<-1>. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Bismuth silicate / sputtering method / metal-organic deposition method / bismuth silicate/silicon structures / thin films |
| Paper # | ED99-327,SDM99-220 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2000/3/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation and Properties of Bi_2SiO_5/Si Structures |
| Sub Title (in English) | |
| Keyword(1) | Bismuth silicate |
| Keyword(2) | sputtering method |
| Keyword(3) | metal-organic deposition method |
| Keyword(4) | bismuth silicate/silicon structures |
| Keyword(5) | thin films |
| 1st Author's Name | Kouji Hiraki |
| 1st Author's Affiliation | Department of Electrical Engineering, Shibaura Institute of Technology() |
| 2nd Author's Name | Masaki Yamaguchi |
| 2nd Author's Affiliation | Department of Electrical Engineering, Shibaura Institute of Technology : Research Organization for Advanced Engineering, Shibaura Institute of Technology |
| 3rd Author's Name | Takao Nagatomo |
| 3rd Author's Affiliation | Department of Electrical Engineering, Shibaura Institute of Technology : Research Organization for Advanced Engineering, Shibaura Institute of Technology / |
| 4th Author's Name | Yoichiro Masuda |
| 4th Author's Affiliation | |
| Date | 2000/3/9 |
| Paper # | ED99-327,SDM99-220 |
| Volume (vol) | vol.99 |
| Number (no) | 673 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |