| Presentation | 2000/3/8 Consideration of Qxygen Source from Vapor Phase and Target by the Growth of Pb(Zr, Ti)O_3 Thin Film Je-Deok Kim, Shinya Kawagoe, Kimihiro Sasaki, Tomonobu Hata, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Perovskite Pb(Zr, Ti)O_3 thin films were obtained with high rate deposition at the low temperature of 450℃ for a (ZrTi+PbO) composite target using quasi-metallic mode of reactive sputtering. From the investigation of deposition mechanism for the PZT thin films, the source of oxygen in quasi-metallic mode of reactive sputtering was found to be from PbO pellets. In this sputtering process, it was found that the amount of supplied oxygen was important parameter to obtain perovskite PZT composition. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Metallic mode / Reactive sputtering / Ferroelectric / PZT |
| Paper # | ED99-322,SDM99-215 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 2000/3/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Consideration of Qxygen Source from Vapor Phase and Target by the Growth of Pb(Zr, Ti)O_3 Thin Film |
| Sub Title (in English) | |
| Keyword(1) | Metallic mode |
| Keyword(2) | Reactive sputtering |
| Keyword(3) | Ferroelectric |
| Keyword(4) | PZT |
| 1st Author's Name | Je-Deok Kim |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering, Kanazawa University() |
| 2nd Author's Name | Shinya Kawagoe |
| 2nd Author's Affiliation | Department of Electrical and Computer Engineering, Kanazawa University |
| 3rd Author's Name | Kimihiro Sasaki |
| 3rd Author's Affiliation | Department of Electrical and Computer Engineering, Kanazawa University |
| 4th Author's Name | Tomonobu Hata |
| 4th Author's Affiliation | Department of Electrical and Computer Engineering, Kanazawa University |
| Date | 2000/3/8 |
| Paper # | ED99-322,SDM99-215 |
| Volume (vol) | vol.99 |
| Number (no) | 672 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |