| Presentation | 2000/3/8 Study of initial growth stage by "In-situ" monitoring growth of dielectric oxide : "In-situ" monitoring growth of TiO_2 thin films using laser Raman spectroscopy K. Morisawa, K. Nishida, S. Muraishi, A. Hiraki, T. Katoda, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In-Situ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | In-situ |
| Paper # | ED99-319,SDM99-212 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2000/3/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study of initial growth stage by "In-situ" monitoring growth of dielectric oxide : "In-situ" monitoring growth of TiO_2 thin films using laser Raman spectroscopy |
| Sub Title (in English) | |
| Keyword(1) | In-situ |
| 1st Author's Name | K. Morisawa |
| 1st Author's Affiliation | Kochi University of Technology() |
| 2nd Author's Name | K. Nishida |
| 2nd Author's Affiliation | Kochi University of Technology |
| 3rd Author's Name | S. Muraishi |
| 3rd Author's Affiliation | Kochi University of Technology : JEOL Ltd. |
| 4th Author's Name | A. Hiraki |
| 4th Author's Affiliation | Kochi University of Technology |
| 5th Author's Name | T. Katoda |
| 5th Author's Affiliation | Kochi University of Technology |
| Date | 2000/3/8 |
| Paper # | ED99-319,SDM99-212 |
| Volume (vol) | vol.99 |
| Number (no) | 672 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |