| Presentation | 2000/2/10 Fabrication of nano-dot arrays using the electron beam site control method Marie Mochizuki, Satoshi Yamada, Fumihito Hirabayashi, Kazuo Tsutsui, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | An "electric beam site control method" is developed as a new approach of quantum dot array fabrication, which has merits of self-assembling method and electron beam techniques. In this method, epitaxial CaF_2 films grown on Si substrates are exposed to an focused electron beam directly, and after that, Ga droplets are spontaneously formed on the exposed sites. It was found that the beam-induced carbonaceous material is deformed by an UV ozone treatment process, and the sharpened small dots of the carbonaceous material play an role of nucleation center of Ga droplets. An other improved process using regrowth of CaF_2, which is expected to provide contamination free and high selectivity, is proposed as well. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | quantum dot array / electron beam / site control / CaF_2 / Ga |
| Paper # | ED99-314,SDM99-207 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2000/2/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of nano-dot arrays using the electron beam site control method |
| Sub Title (in English) | |
| Keyword(1) | quantum dot array |
| Keyword(2) | electron beam |
| Keyword(3) | site control |
| Keyword(4) | CaF_2 |
| Keyword(5) | Ga |
| 1st Author's Name | Marie Mochizuki |
| 1st Author's Affiliation | Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology() |
| 2nd Author's Name | Satoshi Yamada |
| 2nd Author's Affiliation | Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology |
| 3rd Author's Name | Fumihito Hirabayashi |
| 3rd Author's Affiliation | Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology |
| 4th Author's Name | Kazuo Tsutsui |
| 4th Author's Affiliation | Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology |
| Date | 2000/2/10 |
| Paper # | ED99-314,SDM99-207 |
| Volume (vol) | vol.99 |
| Number (no) | 618 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |