| Presentation | 1999/11/19 Electron beam lithography for MOSFET device fabrication Kotaro Kataoka, Ikuo Fujiwara, Shigeki Hayashida, Takayuki Ogura, Masato Umetani, Akira Tanabe, Hiroshi Sakuraba, Tetsuo Endoh, Fujio Masuoka, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | EB / direct writing / proximity effect / MOSFET / ring oscillator |
| Paper # | SDM99-160 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 1999/11/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electron beam lithography for MOSFET device fabrication |
| Sub Title (in English) | |
| Keyword(1) | EB |
| Keyword(2) | direct writing |
| Keyword(3) | proximity effect |
| Keyword(4) | MOSFET |
| Keyword(5) | ring oscillator |
| 1st Author's Name | Kotaro Kataoka |
| 1st Author's Affiliation | Sendai Research Center, Telecommunications Advancement Organization of Japan() |
| 2nd Author's Name | Ikuo Fujiwara |
| 2nd Author's Affiliation | Sendai Research Center, Telecommunications Advancement Organization of Japan |
| 3rd Author's Name | Shigeki Hayashida |
| 3rd Author's Affiliation | Sendai Research Center, Telecommunications Advancement Organization of Japan:Sharp Corp. |
| 4th Author's Name | Takayuki Ogura |
| 4th Author's Affiliation | Sendai Research Center, Telecommunications Advancement Organization of Japan:Sharp Corp. |
| 5th Author's Name | Masato Umetani |
| 5th Author's Affiliation | Sendai Research Center, Telecommunications Advancement Organization of Japan:Oki Electric Industry Corp. |
| 6th Author's Name | Akira Tanabe |
| 6th Author's Affiliation | Sendai Research Center, Telecommunications Advancement Organization of Japan:NEC Corp. |
| 7th Author's Name | Hiroshi Sakuraba |
| 7th Author's Affiliation | Sendai Research Center, Telecommunications Advancement Organization of Japan:Research Institute of Electrical, Tohoku Univ. |
| 8th Author's Name | Tetsuo Endoh |
| 8th Author's Affiliation | Sendai Research Center, Telecommunications Advancement Organization of Japan:Research Institute of Electrical, Tohoku Univ. |
| 9th Author's Name | Fujio Masuoka |
| 9th Author's Affiliation | Sendai Research Center, Telecommunications Advancement Organization of Japan:Research Institute of Electrical, Tohoku Univ. |
| Date | 1999/11/19 |
| Paper # | SDM99-160 |
| Volume (vol) | vol.99 |
| Number (no) | 457 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |