| Presentation | 1999/11/19 The study on automatic measurement method of lens aberration Katsuya Hayano, Norio Hasegawa, Masami Ikota, Naoko Asai, Akira Imai, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | measurement of Coma / Half-tone Phase-shifting Mask / side-peaks / automatic measurement |
| Paper # | SDM99-157 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 1999/11/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The study on automatic measurement method of lens aberration |
| Sub Title (in English) | |
| Keyword(1) | measurement of Coma |
| Keyword(2) | Half-tone Phase-shifting Mask |
| Keyword(3) | side-peaks |
| Keyword(4) | automatic measurement |
| 1st Author's Name | Katsuya Hayano |
| 1st Author's Affiliation | Device Development Center, Hitachi, Ltd.() |
| 2nd Author's Name | Norio Hasegawa |
| 2nd Author's Affiliation | Device Development Center, Hitachi, Ltd. |
| 3rd Author's Name | Masami Ikota |
| 3rd Author's Affiliation | Device Development Center, Hitachi, Ltd. |
| 4th Author's Name | Naoko Asai |
| 4th Author's Affiliation | Device Development Center, Hitachi, Ltd. |
| 5th Author's Name | Akira Imai |
| 5th Author's Affiliation | Device Development Center, Hitachi, Ltd. |
| Date | 1999/11/19 |
| Paper # | SDM99-157 |
| Volume (vol) | vol.99 |
| Number (no) | 457 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |