| Presentation | 1999/11/19 Development of Electron Beam Mask Writing System EX-11 for 0.18um devices and beyond. : Drawing Accuracy Evaluation of Electron Beam Mask Writing System EX-11 Satoshi Yamasaki, Noriaki Nakayamada, Kazuto Matsuki, Tomohiro Iijima, Souji Koikari, kiminobu Akeno, Ryoichi Hirano, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Electron Beam Mask Writing System / the EX-11 / Multi-pass writing / Drawing Accuracy |
| Paper # | SDM99-156 |
| Date of Issue |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 1999/11/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Electron Beam Mask Writing System EX-11 for 0.18um devices and beyond. : Drawing Accuracy Evaluation of Electron Beam Mask Writing System EX-11 |
| Sub Title (in English) | |
| Keyword(1) | Electron Beam Mask Writing System |
| Keyword(2) | the EX-11 |
| Keyword(3) | Multi-pass writing |
| Keyword(4) | Drawing Accuracy |
| 1st Author's Name | Satoshi Yamasaki |
| 1st Author's Affiliation | Advanced LSI Technology Laboratory, Corporate Research and Development Center, Toshiba Corporation.() |
| 2nd Author's Name | Noriaki Nakayamada |
| 2nd Author's Affiliation | Advanced LSI Technology Laboratory, Corporate Research and Development Center, Toshiba Corporation. |
| 3rd Author's Name | Kazuto Matsuki |
| 3rd Author's Affiliation | Advanced LSI Technology Laboratory, Corporate Research and Development Center, Toshiba Corporation. |
| 4th Author's Name | Tomohiro Iijima |
| 4th Author's Affiliation | Advanced LSI Technology Laboratory, Corporate Research and Development Center, Toshiba Corporation. |
| 5th Author's Name | Souji Koikari |
| 5th Author's Affiliation | Advanced LSI Technology Laboratory, Corporate Research and Development Center, Toshiba Corporation. |
| 6th Author's Name | kiminobu Akeno |
| 6th Author's Affiliation | Advanced LSI Technology Laboratory, Corporate Research and Development Center, Toshiba Corporation. |
| 7th Author's Name | Ryoichi Hirano |
| 7th Author's Affiliation | Advanced LSI Technology Laboratory, Corporate Research and Development Center, Toshiba Corporation. |
| Date | 1999/11/19 |
| Paper # | SDM99-156 |
| Volume (vol) | vol.99 |
| Number (no) | 457 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |